■ Model VLS-300 

■ Wafer   300mm 

■ Cassette  Ring frame CST 

■ Docking stroke  N/A 

■ Latch motion  N/A 

■ Operation Time With Mapping  <13 sec 

■ RFID RS 232C

■ Vacuum supply Ø4 one touch fitting 

■ Air supply Ø4 one touch fitting 

■ Interface  RS232C

■ MTBF ≥ 20,000 hour

■ MTTR ≤ 1 hour

■ Repeatability  ≤±0.1mm 

■ Operating Temperature  0℃~40℃ 

■ Operating  Humidity  30% ~ 80%

■ Stable Temperature  -10℃~70℃ 

■ Stable  Humidity  0% ~ 93%