真空超博型晶圆机器人
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真空超博型晶圆机器人型号:
VR8420
产品摘要:
FEATURES - Class 1 clean room environment comply. - Meets various user requirements with fast delivery. - Fleid proven motion control technology enables highest uptime. (single, dual and dump end-effector / telescopic vertical motion mechanism available) - High stiffness with minimum weight using optimum structure design. - Expandable up to 5 axes.- 产品描述
SPECIFICATION
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